Abstract
A strong electron accumulation was observed in a near-surface region of an as-grown nonpolar m-plane (101̄0) InN film by analyzing the valence band hard X-ray photoelectron spectra as a function of the take-off angle. In addition, two oxygen chemical states correlated with electron carrier concentration were observed in the O 1s core-level spectra. By comparing with the oxygen concentration in a bulk-like region, the amount of oxygen drastically increased in a near-surface region, suggesting that the oxygen atoms in the near-surface region act as donors to contribute to the near-surface electron accumulation layer.
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