Abstract
The population of metastable states of argon atoms in high-frequency glow discharge plasma is calculated. Dependences of the population of metastable states of argon atoms in the high-frequency glow discharge plasma on the standard gas flow rate (14–30 sccm) and vibration generator power (10–50 W) in the atmospheres of pure argon and argon-silane (95% Ar + 5% SiH4) mixture are investigated together with the dependence of the population of metastable states of argon atoms in the high-frequency glow discharge plasma on the silane content (0.5–5%) in the argon-silane mixture.
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