Investigation of teos hydrolytic polycondensation in the synthesis of gas-sensitive films for a semiconductor carbon (II) oxide sensor

Abstract

This paper discusses the study of theos hydrolytic polycondensation in the synthesis of gas-sensitive films for a semiconductor carbon (II) oxide sensor. As a result of the our experiments, the composition and proportions of the components for the synthesis of gas sensitive materials for semiconductor carbon monoxide sensors were developed. The composition, porosity, and surface structure of the obtained nanomaterials have been studied by the methods of scanning electron microscopy, X-ray analysis, and differential thermal analysis. Semiconductor sensors have been created that detect CO in a wide range of its concentration.