Abstract
The investigations of the propagation of the SAW in the multilayered structures have been of great interest since the combination of the surface acoustic wave (SAW) technology with the microelectromechanical system (MEMS) technology comes true. In this paper, the recursive asymptotic method (RAM) is applied to analysis the propagation of the SAW in the ZnO–SiO2–Si multilayered structure. The influences of the ZnO layer thickness and the SiO2 layer thickness to the phase velocity and the electro-mechanical coupling coefficient for the Rayleigh wave and Love wave are discussed. The Love mode wave is found to be predominantly generated since the c-axis of the ZnO film is generally perpendicular to the substrate. In order to prove the theoretical results, a series of Love mode SAW devices based on the ZnO–SiO2–Si multilayered structure is fabricated by micromachining, and their frequency responses are detected. The experimental results are found to be mainly consistent with the theoretical ones except the little larger velocities induced by the residual stresses produced in the fabrication process of the films. The deviation of the experimental results from the theoretical ones is reduced by thermal annealing.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.