Abstract
AbstractFor i roving the metalorganic decomposition (MOD) process, such that perovskite Pb(ZrxTi1-x)O3 thin films can be fabricated at low temperatures, understanding of structure development is required. Here we report a nondestructive optical method for investigating the structure development in MOD PZT films. Using this method we have identified the temperatures at which the formation of both pyrochlore and perovskite was completed as a function of Zr/Ti ratio. Also for PZT solid solutions, we have identified the temperatures at which the initial presence of both pyrochlore and perovskite was observed. These temperatures compare very well with those obtained from the X-ray diffraction studies. In contrast to X-ray methods, the proposed technique can also be effectively utilized for studying the pyrochlore formation from the amorphous phase. Furthermore, it was also shown that the optical method can be used for characterizing the phase transformation kinetics in PZT films.
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