Abstract
The instability of polymeric membranes with nano- and micro-sized apertures has been regarded as one of the main reasons behind realizing ultra-thin membranes with apertures. As is well known, when the thickness of the membrane gets thinner or the aperture size gets smaller, the possibility of geometrical deformation or structural damage by collapse or fracture increases. Herein, we suggest the design rules for the stability of polymeric membranes possessing 1D nano-line patterns monolithically constructed on micro-aperture supporting layers. The proposed theoretical model, which has been thoroughly demonstrated and analyzed based on both theoretical and experimental approaches, provides stability criteria for lateral collapse and vertical fracture of ultra-thin membranes with apertures.
Highlights
Thin membranes possessing micro-/nano-scaled apertures have been extensively developed for a wide range of applications, including deposition masks, lithography masks, etching masks, microfluidic devices and filters [1,2,3,4,5,6,7]
The scanning electron microscopy (SEM) images of six types of micro-pillars and one type of nano-lines PDMS mold are shown in Figure 1; the detailed information about the fabrication process of the patterned silicon master and PDMS molds is provided in the Materials and Methods section
We fabricated two-level apertured structures that are nano-arrayed bridges monolithically supported on a micro-apertures membrane by using overlapped oxygen-infiltrated layers (OILs)
Summary
Thin membranes possessing micro-/nano-scaled apertures have been extensively developed for a wide range of applications, including deposition masks, lithography masks, etching masks, microfluidic devices and filters [1,2,3,4,5,6,7]. A variety of techniques to improve the stability of the nanostructured membrane have been explored using diverse materials, factoring in corresponding surface energy, elasticity, transparency and surface hydrophilicity, depending on its purpose. When it comes to the thin membrane with a precisely controlled aperture size and arrangement, nanostructured silicon nitride (SiNx ) membranes supported on rigid Si membranes have been used due to its superiority in mechanical rigidity as well as structural controllability [4]. The ultra-thin layer of the SiNx membrane is likely to suffer from mechanical damage (cracks, breakdown, fractures, etc.) during handling for fabrication processes It requires complicated processes with high fabrication costs. As one of the contenders, free-standing stencils with polydimethylsiloxane (PDMS)
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