Abstract

In this study, Al doped ZnO thin films were synthesized by sol gel spin coating technique. To investigate the effect of Al doping on ZnO properties, Al doping concentration was diversified in the range of 0–5 mol%. The effect of Al doping on structural, morphological, optical and electrical properties of ZnO thin films was evaluated by XRD, SEM, UV-VIS and four point probe measurements. All results whether pure or Al doped ZnO thin films were described in detail and they indicated that the films prepared in this study can be used in many nanotechnological applications.

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