Abstract

We report the structural and photoluminescence properties of annealing dependent and gas and metal ion implanted zinc oxide (ZnO) single crystals. Gd, Na and N ions were implanted into ZnO at an average implantation depth of 12, 24, and 38nm, respectively from the surface layer. The samples were annealed under high vacuum or oxygen at 650°C and their effects were studied. Raman spectra of Gd implanted and oxygen annealed ZnO revealed the A1 longitudinal optical, A1(LO) mode, usually assigned to intrinsic defects, which suggested a partial recovery of implantation induced disorders, unlike ion implanted and vacuum annealed ZnO. Low temperature photoluminescence spectra from unimplanted and Gd implanted ZnO revealed transitions from neutral bound exciton, two electron satellites (TES) and LO phonon replicas. Deep level transitions in unimplanted and Gd implanted ZnO were affected by the annealing atmosphere, and oxygen annealing reduced the deep level emission, suggesting oxygen vacancy related emissions. A small red-shift in the near-band edge emission and a blue-shift in deep level emissions were observed in N and Na implanted and annealed ZnO, indicating slight changes in their band gap energies.

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