Abstract
Specifisities of deformation on nanoscale of hard brittle materials with the hardness exceeding 10 GP by means of scanning probe microscope - nanohardness tester "NanoScan" are investigated. It is found, that pile-up is forming at scratching of sample surface with use of diamond indenter. Heigh of this pile-up depends on hardness and elastic modulus of the material. Definition of the contact area without taking into account height of pile-up leads to an overestimation of hardness values. At scratching of silicon carbide surface a transition from plastic flow to fracture is found out. The results received allowed to estimate fracture toughness KIC for silicon carbide.
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