Abstract
The magnetic field distribution around sub-µm-wide current paths was investigated by magnetic force microscopy (MFM) as a candidate for the current mapping in fine structures. In particular, an undesirable electrostatic force working between an MFM tip and the current path was dynamically eliminated utilizing an extra ac bias to observe the magnetic field correctly. We observed magnetic force signals around current paths consisting of branching or closely aligned metal wires, and the results were compared with results of the numerical simulation of the magnetic field. We found that spatial resolution of magnetic force detection by our method was better than 0.2 µm. The calculation results also indicate that the oscillatory motion of the MFM tip in tapping operation influences spatial resolution.
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