Abstract

We have studied hole selective contacts molybdenum oxide (HyMoOx) fabricated based on solution process and the performance of HyMoOx/c-Si heterojunction solar cells. Characterization of the HyMoOx film revealed an amorphous structure with a low surface roughness of 1.27 nm, chemical composition of HyMoO2.72, high transmittance on glass of over 85%, bandgap of 3.0 eV and low conductivity of 10−6 S/cm. It also possesses a work function of ∼4.95 eV and good passivation effect on c-Si, as the Si surface recombination velocity is observed to reduce by a factor of 85 when passivated by HyMoOx film. The solution processed MoOx as a selective contact on silicon has a low saturation current J0 ∼ 150 fA/cm2 but with a high contact resistivity ∼5.6 Ωcm2. The fabricated HyMoOx/c-Si solar cell has the best power conversion efficiency (PCE) of 8.22%, open circuit voltage (Voc) of 463 mV, short circuit current density (Jsc) of 31.16 mA/cm2, and fill factor (FF) of 56.87%.

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