Abstract
In this paper, polycrystal Ga2O3 thin films were grown on crystal n+-Si substrates by solution process. The XRD profile revealed that monoclinic β-Ga2O3 and rhombohedral α-Ga2O3 were coexisting in the film. The solution-process Ga2O3 film exhibited an ultrahigh transmittance (>97%) to a wavelength range of 280 nm~800 nm. The optical bandgap of ~5.0 eV and breakdown field of 4.2 MV/cm of the Ga2O3 thin film was obtained. Dielectric parameters such as capacitance, dielectric permittivity and loss tangent were investigated. It was observed that these parameters have a strong dependence on frequency.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
