Abstract
An inter-cavty contact single mode 850nm VCSEL was fabricated with a graphene assisted self-assembly curved dielectric bubble Bragg mirror for the first time. Taking the advantage of graphene’s uniform low surface energy, the low cost dielectric bubble DBR (Si3N4/SiO2) was deposited on top of the graphene/half-VCSEL structure via van der Waals Force (vdWF) without using any additional spacing elements and sacrificial layer release-etch process. The continuous-wave operating VCSELs with an aperture diameter of 7μm exhibit single-mode output power of more than 1mW with a slope efficiency of 0.2W/A. The sidemode suppression ratios are >40dB. This novel modification into the lasers can also be applied to a variety of other optoelectronic devices, such as resonance photodetecter and super narrow linewidth VCSEL.
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