Abstract

SiC films were deposited onto thin discs of 316L stainless steel by ion beam assisted deposition (IBAD) and/or ion implantation. The film thickness can be up to 2 μm. The permeability of tritium gas through stainless steel discs was measured at 308∼320°C. The composition and microstructure of the films were also analyzed using X-ray photoelectron spectrometry (XPS), Auger electron spectrometry (AES) X-ray diffraction (XRD) and transmission electron microscopy (TEM). The results show that the modification with SiC films reduces the tritium permeability down to approximately 3×10 −15 mol(NTP) m −1 s −1 MPa −1/2, by five orders of magnitude lower compared with the clean surface of SS 316L. The C/Si atomic ratio in the films depends on the conditions of preparation. A higher C/Si ratio can be obtained with the deposition from both Si and graphite targets and assisted by simultaneous C ion bombardment. A narrow scan XPS of Si 2p and C 1s peaks show that some SiC chemical bonding has formed inside the films. AES line-shapes of C KLL and Si LVV are also indicative of SiC bonding. It has been found by TEM that most IBAD films are amorphous or superfine-grained. However, a number of crystallites can be seen which can be interpreted as α-SiC-2H with the lattice parameter a=0.3076 nm and c=0.5048 nm. The existence of certain Si– and C– dangling bonds is believed to be the origin of tritium trapping and retarded diffusion.

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