Abstract
In order to reduce or eliminate the surface defects caused by abrasive grains and improve the efficiency of ultra-precision processing, the technique of semi-fixed machining has been proposed for machining advanced ceramics. A semi-fixed abrasive tool (SFAT) has been manufactured; it has performances of semi-fixed machining technique. This document demonstrates wear characteristics of SFAT through experiments of machining silicon wafer. It showed that wet status or dry status of SFAT has greatly influenced wear characteristics of SFAT. Wear characteristic of SFAT presented mostly blockage and little grain-off occurred in dry status; mostly grain-off and little blockage presented in wet status.
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