Investigation of Self Interstitial Influences in Light and Dark Induced Degradation in p-type Compensated Silicon

Abstract

In this study, based on p-type strongly compensated electronic grade monocrystalline Cz silicon, one tried to find if self interstitials have a direct or an indirect role in light and dark induced degradation (LID and DID respectively). Many studies have been carried out on LID phenomenon due to the formation of boron-oxygen complexes under light exposure. Some of them compare as-cut wafers and wafers which have been treated by phosphorus diffusion. They show that the LID phenomenon is reduced when samples have been phosphorus diffused. This effect has been explained by self interstitial injection in the bulk during the phosphorus diffusion, but the role of these self-interstitials on LID phenomenon is not yet well defined [1] [2] [3]. In this paper, investigations on the degradation kinetic are made in as-cut wafers, in phosphorus diffused wafers and in wafers which were annealed in the same conditions used for the phosphorus diffusion. Comparisons of the results allow us to pinpoint the role of self-interstitials on LID phenomenon. It seems that the presence of a high self interstitial concentration reduce the formation of BsO2i complexes responsible for the first faster degradation.