Abstract
Ruthenium was evaporated on n-GaAs to form Schottky contacts. Initial electrical measurements revealed a near ideal Schottky behaviour with low leakage currents. The Schottky diodes exhibit good stability upon thermal aging at elevated temperatures up to 300° C. However, the diode parameters rapidly deteriorate after aging at temperatures in excess of 400° C. The room temperature (300 K) median life of the diodes, based on a failure criterion of a tenfold increase in the diode saturation current, Jrivs, from reverse bias current-voltage (I–V) data, was of the order of 104 h.
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