Abstract
We have investigated the optical properties of AlxGa1—xN films by using the prism coupling technique. The refractive indices of AlGaN/AlN and AlGaN/GaN heterostructures were accurately measured as a function of the aluminum molar fraction x at 632.8 nm. Optical losses, which are very sensitive to defects content, were evaluated around 1.2 dB/cm in AlGaN/GaN and 1.8 dB/cm in AlGaN/AlN. The origin of these losses was related to the crystalline quality of epitaxial AlGaN layers and the nature of buffer layers.
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