Abstract
A novel multilayer Cr/CrN/CrTiN/CrTiAlN hard coating with four bilayers was developed by reactive closed field unbalanced magnetron sputtering (CFUBMS). The substrate temperature was kept in the range of 170 °C to 200 °C. The reactive gas flow was controlled by Optical Emission Monitoring. A thickness of 1.8 μm was determined using a calotester. The morphology and chemical composition were studied by electron microscopy (SEM and EDS). Nanohardness of 34.1 GPa and a modulus of elasticity of 386 GPa were determined using the nanoindentation technique. The scratch test against a diamond Rockwell indenter did not show features indicating poor adhesion. The reciprocating wear test revealed strong resistance to wear, and a coefficient of friction of 0.19 was determined. The developed multilayered hard coating showed optimal mechanical properties for industrial applications on instruments of low-temperature materials.
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