Abstract
This paper presents the results of an experimental study of the parameters of nitrogen, argon and helium plasma obtained in high-frequency capacitive ring discharge at a pressure of 35 Pa. The parameters were determined by a single Langmuir probe. Work is being carried out as part of a project to develop a backlash ion microwave plasma generator. The object of study is ionized gas formed in the ring capacitance gap of a microwave solid-state generator emitter on the MOSFET transistor MRF284. The power consumed by the microwave generator in the study is no more than 5 W. The work resulted in getting the volt-ampere characteristics of a high-frequency discharge in low-pressure gas and determining the main plasma parameters.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
