Abstract
In this paper, within the framework of a self-consistent multilevel hybrid model, the kinetics of electrons in the negative glow region in similar glow discharges in helium at low and medium pressures is considered. The model is based on solving a two-dimensional kinetic equation for the electron distribution function written in the Fokker-Planck form and one-dimensional balance equations for the densities of charged and excited particles, the Poisson equation for an electric field. Within the framework of the model, the experimentally observed distributions of plasma parameters obtained using probe diagnostics are reproduced. The results are compared with the results of calculations obtained on the basis of an extended hydrodynamic model. Within the framework of the hybrid model, the formation of the spectrum of Penning electrons from impurities of complex molecules with an energy above the temperature of the main group of electrons is shown.
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