Abstract

The proper understanding of magnetized plasma wall-interaction is important in various plasma applications such as surface modifications, sputtering and etching. A multi-component plasma interacting with carbon surface in presence of an oblique magnetic field has been investigated using three-fluids model. In the present case, the plasma is assumed to consist of two species of positive ions (H+ and He+) and electrons. The governing equations are solved numerically for given initial and boundary conditions. The results show that the magnitude of sheath potential increases with the increase in electron temperature and it affects velocity of both ion species, which is crucial in the understanding of plasma wall-transition mechanism. The reflection coefficients of lighter and heavier ions for the carbon surface decrease with the increase in ion velocity and in reduced energy; however the lighter ions are reflected more than the heavier ions. Hence, the absorption coefficients of both the ions increase for the increase in ion velocity and reduced energy as well. Furthermore, the reflection coefficient of hydrogen ions is about 20% more in magnitude than that of helium ions for the carbon surface.

Highlights

  • In all practical applications of plasma, it is contained in a chamber and confined by material walls

  • As the plasma contacts with material walls, the plasma particles interact with the surface and the understanding of plasma-wall interaction is crucial in all possible plasma applications

  • In order to study the interaction of multi-component plasma with carbon surface, the velocity of incident ions at the wall are determined by solving compiled set of fluid equations (8)–(17) numerically

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Summary

Introduction

In all practical applications of plasma, it is contained in a chamber and confined by material walls. Hatami et al. have studied the multi-component magnetized plasma sheath and shown that the magnetic field and its obliqueness have significant effects on ion density, velocity and potential profiles. Khoramabadi studied the effect of collisional force in magnetized plasma sheath having two species of positive ions. Khanal studied the magnetized plasma sheath having two species of positive ions through fluid and kinetic approaches. It is found that the collision frequency, ion Mach number, electron temperature and ion concentration ratio have significant effect on the plasma-wall interaction process. The presence of second ion species affects the distribution functions at the sheath entrance and at the wall as well. The magnitudes of cut-off and Maxwellian maximum velocities have same values at the sheath scitation.org/journal/adv entrance; increase at the wall for increase in the concentration of second ion species. They reported that the reflection coefficient of projectiles depend on the kinetic energy of incident ions and in the mass ratio of target to projectiles

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