Abstract
A method of layer thickness determination by X-ray photoelectron spectroscopy (XPS) is analyzed. Angle-resolved XPS spectra measured for three samples (gold films of different thicknesses located on top of silicon substrates) have been interpreted by the straight line approximation (SLA) model. Two configurations of films were considered: (i) a flat surface of a semi-infinite layer (substrate) is covered with a flat homogeneous layer, (ii) coating constitutes an island (cluster) structure. It is shown that the simplest model of an island coating makes it possible to qualitatively explain the effect of decreasing of the effective average coating thickness observed in the angle-resolved XPS experiments.
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