Abstract
An optical method has been developed to measure the deformation of a membrane in a microphone. A fringe projector that consists of an optical fiber and an optical wedge is described and analyzed by geometric optics. A three-step phase-shifting technique that involves the introduction of an arbitrary phase is discussed. The fine fringe patterns projected onto a small test surface are captured by a CCD camera mounted on a long-distance microscope. With the aid of a phase-shifting technique and signal-demodulating techniques, the proposed setup is capable of measuring deformation of the membrane of the order of as much as submicrometers.
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