Abstract
Lattice distortions due the implantation of Fe+ ions in InP semi-insulating crystals have been investigated by means of high-resolution x-ray-diffraction and x-ray standing-wave methods. The effects of both the implantation dose and the annealing time were studied. It is shown that the x-ray standing-wave method provides valuable complementary information on strain and damage in the subsurface layer and permits one to distinguish between different distortion profiles that give practically the same kinematical diffraction curve.
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