Abstract
Here, the investigation of laser-induced polymerization using a four-beam interference intensity distribution is demonstrated. The relationship between the laser intensity, the irradiation time, the period of interference intensity distribution and the diameter of a fabricated micro-structure at the substrate surface is found. The calculated values are in good agreement with the experimental results. The micro-pillars fabricated via four-beam interference lithography and single-photon absorption have a spherical shape on the top and can be used as micro-lenses. The investigation results show that the radius of curvature correlates with the laser irradiation dose and for higher laser irradiation dose, the radius of curvature is increasing due to the monomer diffusion during the fabrication process. The demonstrated flexible ability to control the radius of curvature of fabricated micro-pillars makes the four-beam interference method attractive for the micro-lens array fabrication.
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