Abstract
We report a dual-junction strategy for fabricating a high-performance In2SexOy/In2Se3/Si heterojunction photodiode by oxidizing the epitaxial In2Se3 thin films. The device exhibits a suppressed dark current (4.2 × 10−11 A) and enhanced photocurrent at zero bias, benefiting from the double built-in electric fields. Consequently, it demonstrates excellent and uniform self-powered broadband (255–1050 nm) photodetection performance with the typical responsivity of several hundred mA/W, and detectivity of over 5 × 1011 Jones. Moreover, a fast response speed with a response time of 0.20 ms is achieved. Our investigation offers a potential route to construct full-spectrum photodetectors.
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