Abstract
This work is about the design, manufacturing process and characterization of an interdigital capacitor (IDC) sensor for graphene based biosensing applications. Certain layouts with different active sensor area and linespace ratios are investigated with analytic models and simulation models. Furthermore chips are manufactured and characterized on wafer level among the electrical parameters resistance and capacitance. The sensors have been used, for the detection of biomarkers through a functional layer reduced graphene oxide, immobilized with biomolecules, and characterized with low frequency electrochemical impedance spectroscopy (EIS). The aim is to identify the sensor layout with the best sensitivity at low frequency.
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