Abstract
The superconducting properties of 85 nm thick hafnium thin films with a 5 nm thick titanium layer on top have been investigated for three different geometries, that is, a film covering the entire 7 × 7 mm2 chip surface, bridges with a width of 200 μm and length up to 1800 μm, and bridges in the form of squares with sides from 100 to 1000 μm. The bridges were formed by a photolithographic lift-off process and are intended to be used as the main sensing element of a microcalorimeter based on a transition-edge sensor (TES) in experiments to determine the magnetic moment of neutrinos. Based on the measurements of the critical current, the critical temperature, and the width of the superconducting transition, we estimate the energy resolution δE of the TES prototypes, showing that it is possible to fabricate microcalorimeters with δE less than 1 eV using these films.
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