Investigation of geometric design in piezoelectric microelectromechanical systems diaphragms for ultrasonic energy harvesting

Abstract

Acoustic energy transfer (AET) has been widely used for contactless energy delivery to implantable devices. However, most of the energy harvesters (ultrasonic receivers) for AET are macro-scale transducers with large volume and limited operation bandwidth. Here, we propose and investigate two microelectromechanical systems diaphragm based piezoelectric ultrasonic energy harvesters (PUEHs) as an alternative for AET. The proposed PUEHs consist of micro-scale diaphragm array with different geometric parameter design. Diaphragms in PUEH-1 have large length to width ratio to achieve broadband property, while its energy harvesting performance is compromised. Diaphragms in PUEH-2 have smaller length to width ratio and thinner thickness to achieve both broadband property and good energy harvesting performance. Both PUEHs have miniaturized size and wide operation bandwidth that are ideally suitable to be integrated as power source for implantable biomedical devices. PUEH-1 has a merged −6 dB bandwidth of 74.5% with a central frequency of 350 kHz. PUEH-2 has two separate −6 dB bandwidth of 73.7%/30.8% with central frequencies of 285 kHz/650 kHz. They can adapt to various ultrasonic sources with different working frequency spectrum. Maximum output power is 34.3 nW and 84.3 nW for PUEH-1 and PUEH-2 at 1 mW/cm2 ultrasound intensity input, respectively. The associated power density is 0.734 μW/cm2 and 4.1 μW/cm2, respectively. Better energy harvesting performance is achieved for PUEH-2 because of the optimized length to width ratio and thickness design. Both PUEHs offer more alignment flexibility with more than 40% power when they are in the range of the ultrasound transmitter.