Abstract
It is well known that MOS gas sensors are not only sensitive to hydrogen but also to unsaturated hydrocarbons or solvent vapours containing hydrogen atoms. The relative sensitivity to different gases depends upon the choice of the catalytic metal, so that MOS sensor arrays can be made. This paper describes measurements with binary mixtures of gases using different catalytic metals. For the evaluation of the signal spectrum obtained from a sensor array, it is useful to fit specific mathematical expressions to the measured data. A simple linear relationship based on the Lundström model was used in our case. The model parameters are evaluated and the fitting errors are determined. The cross-sensitivity of a single MOS sensor element is compared with the cross-sensitivity of a MOS sensor array, evaluated by PARC methods.
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