Investigation of field electron microscope tips bombarded with microparticles at limited field emission currents

Abstract

Mo, Ta, W, and Re field electron microscope (FEM) tips, bombarded with microparticles at limited field emission currents (400 MΩ resistor in series with the FEM tip) were investigated by means of FEM, transmission electron microscopy (TEM), and scanning electron microscopy (SEM). Two groups of tips could be distinguished: One group had a slight tip radius increase to a maximum of 2.5 μm and microcraters were formed along the tip shank. The other group had no detectable tip radius change; however, there was microcrater formation near the tip apex area. FEM patterns showed surface contamination clearly. Heating such contaminated tips and tips where phosphorescent material (Zn:Cd)S had been deposited in less than monolayer concentration by evaporation from a heating coil, resulted in similar sequences of FEM patterns. A new type of microcrater with smooth crater lips could be detected in both groups. These results support the combined microparticle-field emission mechanism [1], which was proposed earlier to be responsible for melting cap and microcrater formation.