Abstract
Evaporation effect on calibration system for liquid micro flow sensors has been investigated since the evaporation effect becomes a significant error source of a weighing system as flow rate decreases. In the low-flow water calibration rig of NMIJ, the calibration factors were corrected by the evaporation rate, which was estimated without installation flow to the weighing tank. The evaporation rate from the weighing tank with and without water flow inside the weighing tank was evaluated experimentally, indicating that the effect of water flow inside the weighing tank on the evaporation rate was smaller than the evaporation rate. Based on the experimental results, future subjects of calibration apparatus for micro-flow or nano-flow ranges were discussed.
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