Investigation of electrophysical and mechanical parameters of piezoceramic materials for cartridge-type deformable mirrors

Abstract

We investigated electrophysical and mechanical parameters of the piezoceramic materials based on lead zirconate titanate. In correspondence with obtained data, modules with multilayer actuators with cross-section area of 4 × 4 mm, nominal displacement up to 4.3 µm and capacitance of the element with 12 nF for cartridge-type deformable mirror were produced.