Investigation of Electromechanical Coupling and Quality Factor of X-Cut Lithium Niobate Laterally Vibrating Resonators Operating Around 400 MHz

Abstract

In this paper we present laterally vibrating resonators (LVRs) based on X-cut lithium niobate (LN) exhibiting a maximum quality factor $({Q})$ around 1200 and an electromechanical coupling ( $k_{t}^{2}$ ) of 30%. This paper shows how the highest $k_{t}^{2}$ ever attained in X-cut LN resonators can be combined with very high ${Q}$ to achieve a resonator figure of merit (FoM $= k_{t}^{2}\cdot {Q}$ ) of 360. In this paper, we validate the theoretical prediction of $k_{t}^{2}$ versus the resonator orientation in the YZ plane and investigate what geometrical parameters mostly impact the ${Q}$ of these devices. [2017–0181]