Abstract
This paper performs a detailed investigation on the electromagnetic angle sensor integrated in the flame retardant 4 (FR4)-based scanning micromirror. An accurate theoretical model is presented, especially considering the coupling effect between the driving and sensing coils. Experimental results agree well with the theoretical results, and show a sensitivity of 55.0 mVp/° and a high signal-to-noise ratio (SNR) of 71.9 dB. Moreover, the linearity of the angle sensor can still reach 0.9995, though it is affected slightly by the coupling effect. Finally, the sensor’s good feasibility for feedback control has been further verified through a simple closed-loop control circuit. The micromirror operated with closed-loop control possesses better long-term stability and temperature stability than that operated without closed-loop control.
Highlights
Scanning micromirrors are essential core elements in various optical microsystems [1,2,3,4]
In order to measure the coupling voltage coupled from the driving signal, and keep the device virtually undamaged at the same time, we take away the magnets of the assembled micromirror, so that the mirror plate cannot move due to the absence of a magnetic field, and excite the driving coil to see the output of the sensing coil
The coupling coupling parameters
Summary
Scanning micromirrors are essential core elements in various optical microsystems (e.g., barcode reader, endoscopic probe, and LiDAR) [1,2,3,4]. Electromagnetic angle sensing is more suitable to be integrated in the angle sensor It focused more on basic prototyping, driving performance, and reliability aforementioned FR4 micromirror, due to its excellent process compatibility. As a continuation of previous work, this paper performed accurate modeling [15], we presented a FR4-based electromagnetic scanning micromirror monolithically integrated and detailed tests of the integrated angle sensor. As a continuation of previous work, this paper a simple closed-loop control circuit is developed toof further verify the angle sensor’s good feasibility performed accurate modeling and detailed tests the integrated angle sensor. A simple closed-loop circuit is developed verify the angle sensor’s feasibility for providing feedback electromagnetic angle good sensor integrated in the FR4a real-time micromirror, and signal.
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