Abstract
The molecular dynamics simulation has been utilized to investigate the structural damage via heavy ion irradiation in graphene. The effects of stacking and incident angle of ion on the structural damage are mainly explored. The growth of stacking layers makes structural damage of overall and surface layer more and more serious. The damage of each layer shows obvious differences, the damage becomes weaker toward the centre. The effect of incident angle on damage is discussed in 3-layer graphene. The two surface layers are not affected while the damage of intermediate layer is weak with the decrease of incident angle. The driving force for structural damage is the stress wave propagating from the energy deposition region to the surrounding.
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