Abstract
This paper devotes to investigate the influence of vibration acceleration on measurement of piezoresistive pressure. For the sake of definiteness, sensor operation conditions in high-speed train are considered. Where, the sensor chip is loaded with dynamic accelerations with frequency within 20 Hz. The real state of the pressure sensor under different frequency vibration load is simulated by using large mass method (LMM). And the voltage output of the pressure sensor under different vibration loads was obtained by the joint simulation of electrical- structure. By analysis of different vibration loads and the voltage output of sensors, their internal relations are obtained. These outcomes provide a guidance for elimination of vibration influence in high-speed train surface fluctuation pressure measurement. It is also useful in other fields of pressure sensor operation in acceleration-loaded environments.
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