Abstract
Abstract In this paper dynamical instability of three-layer micro-switch under DC voltage actuation has been studied. Recent studies have used the classical beam theory while leaving out the length scale parameter. In this paper dynamic behavior of the switch has been investigated based on couple stress theory and considering the length scale parameter. To this end, governing dynamic equation of the micro switch has been extracted and presented. Considering the nonlinearity of governing equation due to the existence of electrostatic force, Galerkin method has been implemented to overcome this nonlinearity and solve the mentioned equation and obtain the dynamic response. Dynamic response of micro switch has been investigated with and without considering the damping effects. Variation of dynamic pull-in voltage versus micro beam length and primary gap between micro beam and stationary electrodes have been studied using couple stress and classic beam theory and obtained results have been compared to each other. Also dependency of dynamic pull-in voltage to damping factor has been studied with considering two theories. Furthermore switching time of micro switch have been determined and compared using couple stress and classic beam theories.
Highlights
Nowadays micro electro mechanical devices have shown remarkable significance in various industries such as automation, military, medical, telecom
Considering the length scale parameter and application of couple stress theory instead of classic beam theory is an essential issue in the case of mechanical analysis of micro structures
The governing dynamic equation of three layer micro-switch subjected to electrostatic force and considering length scale parameter of micro-beam are presented
Summary
Nowadays micro electro mechanical devices have shown remarkable significance in various industries such as automation, military, medical, telecom. Considering the length scale parameter and application of couple stress theory instead of classic beam theory is an essential issue in the case of mechanical analysis of micro structures. Some works have devoted to analysis of static and dynamic behavior of micro and nano structures considering the length scale parameter. With regard to the importance of dynamic analysis of these switches and considering this effect, this paper is devoted to study the dynamic behavior, instability and pull-in voltage of three layer micro switch with considering length scale parameter and using couple stress theory instead of classic beam theory. The importance of considering or neglecting this effect has been discussed For this aim, the governing dynamic equation of the micro-switch has been presented. In the rest of the paper, the model description, mathematical model of micro switch, obtained results and supplementary discussion for results are presented
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