Investigation of diffractive optical element with continuous relief and submicron feature size for fiber coupling

Abstract

Study of diffractive optical element (DOE) with submicron feature size and continuous relief used for fibre coupling is discussed in detail in the view of design, microfabrication and testing. Diameter of the DOE as small as 65pm is realized by means of focused ion beam (FIB) technology. Focused Ga+ ion beam is used to mill the continuous relief micro-structure under acceleration voltage of 50KV. It is shown by testing results that the designing is satisfied with application requirement and manufacturing by FIB is practical and available.