Abstract
Composition variations in thin transverse sections of rf-sputtered Co 78.5Cr 21.5 films have been studied by X-ray microanalysis using a scanning transmission electron microscope. Analyses with a spatial resolution substantially better than 10 nm have shown that Cr rich regions exist in the boundary layers between 50–100 nm diameter columns which dominate the microstructure of such films. The extent of the measured Cr enrichment is≈1.5 at%, but when beam broadening effects are taken into consideration, the true segregation is found to be much greater. The implications of these results on the magnetic properties of the films are discussed.
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