Investigation of changes in the properties of diamond-like films under friction by the XPS method

Abstract

The combination of unique physicochemical, mechanical and tribological properties of diamond-like coatings determines the prospects for their use in critical friction units, including those operating in a rarefied atmosphere and vacuum. The properties of diamond-like carbon (DLC) coatings depend on the contribution of the sp2 and sp3 fractions of the carbon hybrid atomic electron orbitals. Modern methods of determining the graphite and diamond proportion in coatings are time-consuming and insufficiently accurate. In addition, the determination of the sp3/sp2 ratio is often difficult due to the displacement of the energy position of the C1s electron line. In this paper, the change in the chemical state of carbon over the thickness of a diamond-like coating is studied by X-ray photoelectron spectroscopy. Analysis of the carbon line fine structure of the differential graphite spectra (sp2 bonds) and diamond (sp3 bonds) allowed us to establish the parameter δ, which determines the ratio of the graphite and diamond components in the DLC coating. Profiling with Ar+ ions of the diamondlike coating surface showed that with an increase in the etching time, the proportion of amorphized carbon increases, which means that the antifriction properties increase with the abrasion of the coating. The obtained regularities allow us to predict changes in the tribological properties of DLC coatings during operation. Ion profiling also allows to determine the thickness of coatings with high accuracy.