Investigation of borophosphosilicate glasses synthesized by the sol-gel method

Abstract

The synthesis of vitreous borophosphosilicate materials by the sol-gel method is investigated. The differential thermal analysis and IR spectroscopic studies of xerogels and vitreous materials prepared are carried out. The permittivity of the vitreous material at a frequency of 1 MHz, the dielectric loss tangent, and the linear thermal expansion coefficient in the temperature range 20–500°C are determined. The vitreous dielectric synthesized can be used for the interlayer insulation of silicon integrated circuits and the creation of “siliconon-insulator” structures.