Abstract
ABSTRACTWe have investigated electronic band-gap states in AlGaN/GaN hetero-structures with different growth conditions of GaN buffer layers from a viewpoint of Carbon impurity incorporation into GaN, using photoluminescence (PL), capacitance-voltage (C-V) and steady-state photo-capacitance spectroscopy (SSPC) techniques. The Carbon incorporation was found to be enhanced with decreasing the growth temperature of the GaN buffer layer between 1120 and 1170 °C. Acting in concert, three specific deep levels located at ~2.07, ~2.70, and ~3.23 eV below the conduction band were found to become dense significantly at the low growth temperature. Therefore, these levels are probably attributable to Ga vacancies and/or Carbon acceptors produced by the Carbon impurity incorporation, and are likely in conjunction with each other.
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