Abstract
This paper presents an analysis of acoustic sensing for laser grooving and cutting processes. Theoretical models of the interaction between the coaxial gas jet and the erosion front were developed using the wave equation to relate acoustic emission to the geometry of the groove or kerf. Theoretical estimates are compared with experimental results for acrylic, aluminum oxide and stainless steel. Process control schemes for groove depth regulation for laser grooving and beam break-through regulation for laser cutting are introduced.
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