Investigation into position deviation effect on micro newton force sensor

Abstract

The position deviation effect on force sensor with a resolution of micro newton scale was investigated by theory model analysis and numerical simulation method. The finite element method and theoretical model were used to analyse the influence of the electrostatic micro force sensors when the electrode position of the cylindrical capacitor changed. Relationship between the sensor output micro force and the position deviation of the internal electrode in the cylindrical capacitance was obtained. It was found that different position deviation form had different degrees of influence on the sensor’s output result and the regions with little effect by position deviation were existed. For translation along Z-axis, the region was [-4 mm, 14 mm]. For translation along r-axis, the region was [-0.2 mm, 0.2 mm]. And for rotation around r-axis, the region was [-1°, 1°]. The corresponding maximum errors of the micro force output were 1.49%, 2.09% and 2.20%, respectively.