Abstract
A recent approach to increase the mass sensitivity of quartz crystal microbalance (QCM) sensors is by adopting sensing mediums made of high aspect ratio resonant micropillars. In this paper, finite element method (FEM) simulation of a 5MHz QCM with a resonant SU-8 micropillar over its surface is conducted and the significant relation between the resonance frequency shift sensitivity of the QCM-pillar coupled resonating system and the dimensions of the micropillar is analyzed. Three resonance frequency tuning methods are proposed: positive, negative frequency shifts, and bandwidth tuning. These are found by investigating the effects of variations in the equivalent Butterworth-van-Dyke (BVD) components of the QCM known as damping, energy loss and contributions of series or parallel capacitance on the sensor resonance frequency. The contribution of our research is to overcome the fabrication limitations of nano or micropillars away from the theoretical critical height to improve the mass sensitivity of coupled resonator sensors (CRSs).
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