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Abstract
Radiofrequency inductively coupled plasma is used to form new polystyrene. In order to gain insights into the process of radiofrequency styrene plasma polymerisation, the gas phase plasmas were investigated by optical emission spectroscopy. The pulsed plasma-deposited films were characterised by transfer Fourier infrared spectroscopy and X-ray photoelectronic spectroscopy. With the variation of different plasma parameters, characters of plasma polymer film vary and parameters of plasma have a certain tendency. The optical emission spectra acquired in the plasma gas showed the variation of specie intensity with the plasma parameters. In this paper, the correlation between the plasma gas and the character of the deposited films was discussed, and the functional thin film was carried out by the parameters of plasma.
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