Abstract
A study is presented of the damage caused by low energy electrons from a flood gun used for charge neutralisation in static SIMS. It is found that, in a typical time-of-flight (TOF)-SIMS instrument, the electron fluence during spectrum acquisition would be around 1.9×10 20 electrons/m 2. Analysis of the molecular fragmentation for PS, PVC, PMMA and PTFE shows that an upper limit of 6×10 18 electrons/m 2 can be defined to retain intensities at 1% of their true levels. At a fluence of 7.5×10 20 electrons/m 2 the relative signal intensities, for some materials, have changed by over a factor of four. Recommendations for flood gun currents and fluence are provided to ensure that no significant electron damage occurs but that charge neutralisation is maintained.
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