Abstract
This paper describes the fabrication of a series of micro ball-ended stylus tips by applying micro-EDM (Electrical Discharge Machining) and OPED (One Pulse Electrical Discharge) processes, followed by a manual assembly process of a static tri-switches tactile structure on a micro-CMM (Coordinate Measuring Machine). This paper further proves that the essential performance of the proposed system meets an acceptable benchmark among peer micro-CMM systems with a low cost. The system also adjusts for ambient temperature and humidity as the ordinary lab environmental conditions. For demonstration, several experiments used a randomly selected glass stylus with the diameters of stem and sphere of 0.07 mm and 0.12 mm, respectively. By leveraging research guidelines and common practice, this paper further investigates the probing relationship between measurement accuracy and its associated critical characteristics, namely triggering scenarios and geometric feature probing validation. The experimental results show that repeated detections in the uncertainty, in vertical and horizontal directions of the same point, achieved as small as 0.11 μm and 0.29 μm, respectively. This customized tri-switches tactile probing structure was also capable of measuring geometric features of micro-components, such as the inner profile and depth of a micro-hole. Finally, extensions of the proposed approach to pursue higher accuracy measurement are discussed.
Highlights
Thanks to ongoing advancements in micro manufacturing technology over the past several decades, demand for micro-products, such as micro bio-medical and optical devices and MEMS (Microelectromechanical Systems) products, has been increasing significantly.To enhance manufacturing efficiency and improve quality for micro-products, high accuracy measuring devices are essential for micro fabrication technology
After 30 contact repetitions, the average triggering force in probing head was measured by a micro load cell which was mounted on the micro-CMM to measure the the vertical direction was estimated as 1.27 ± 0.01 mN with 5% of risk, which met the stiffness triggering force inofthe
The atechnology introduced paper on combines fabrication and assembling processes to develop a novel probing head that is mounted on a micro‐CMM and is capable of multi‐directional measurement onprobing geometric features a micro‐part
Summary
To enhance manufacturing efficiency and improve quality for micro-products, high accuracy measuring devices are essential for micro fabrication technology. Conventional measuring devices, such as the Vernier calipers and micrometers, are incapable of measuring delicate micro-components. While a wide variety of optical measuring methods have been developed for measurement of micro-products, non-contact methods have yet to be developed for measuring the lateral-wall, high-aspect ratio and high reflection in micro-parts. In order to measure the geometry of micro-products, the micro coordinate measuring machine (μ-CMM) and a number of delicate tactile triggering structures have been developed [1,2,3]. The micro tactile spherical styli with a diameter of 0.125 mm are
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